China's Binhua Group Achieves 6N High-Purity Hydrogen Fluoride Production for Semiconductors

Chinese chemical company Binhua Group has announced the start of industrial-scale production of 6N-grade (99.9999%) high-purity hydrogen fluoride (HF). Known as the "chemical carving knife" of the semiconductor industry, HF is an indispensable raw material for chip etching and cleaning processes.

6N-grade HF is essential for manufacturing advanced chips using processes of 28 nanometers and below. Historically, the core technology for this material has been monopolized by overseas companies, with domestic production typically limited to 5N-grade (99.999%). Even minor impurities can significantly reduce the yield and reliability of domestically produced chips, making it a classic "bottleneck" material.

This new domestic production aims to break that international reliance. Previously, foreign firms controlled approximately 80% of the global 6N-grade HF market, with prices exceeding 2 million yuan per ton. Binhua Group's product reportedly meets international standards, with critical metal ion impurity levels below 1 part per billion (ppb).

The company stated that the production breakthrough is a result of comprehensive system innovation, not just a single technical achievement. This involved overcoming challenges in multi-stage distillation, equipment material selection, cylinder cleanliness, and precise trace impurity detection. Binhua has completed the construction and commissioning of a 50-ton per year filling line and obtained the necessary permits for production and sales.

Binhua has begun promoting the product to key industry enterprises. This development is expected to enhance the competitiveness of the regional chemical industry in high-end electronic chemicals and support national efforts toward self-sufficiency in the semiconductor supply chain.