EHT Semi Integrates Bird RF Measurement for Semiconductor Process Control
EHT Semi has integrated Bird RF measurement technology into its semiconductor power platforms to enhance process accuracy and reliability. The new solution offers a unified measurement reference across calibration and production.
Seattle, WA – EHT Semi announced the integration of Bird RF measurement technology into its semiconductor power platforms, including the Orion™ Direct RF™ System and tailored waveform generators. An embedded Bird probe, with NIST-traceable calibration, provides primary measurement of power, voltage, current, and impedance.
The integration aims to provide measurement continuity from factory calibration and system validation through to fab testing and measurement. This approach gives semiconductor manufacturers a common measurement reference across the equipment lifecycle, enhancing confidence in the RF power data used to characterize, verify, and control advanced processes.
The integrated Bird probe is now available in selected Orion™ Direct RF™ System and tailored waveform power systems. The resulting measurement and control architecture enables power regulation within 2% of the set point through fast, dynamic load changes, supporting the stability and responsiveness required for demanding plasma and process conditions.
The integration stems from a collaboration between EHT Semi and Bird, focused on applying industry-trusted RF measurement technology to the needs of semiconductor manufacturing. The high-fidelity measurement data generated by the integrated Bird probes can support advanced diagnostics, process analytics, and the development of AI-accelerated feedback and control strategies.