Fraunhofer Institute Develops More Sustainable Microchip Production Methods

The Fraunhofer Institute is working to make microchip production more sustainable as part of the broader GENESIS EU project. Increasing demand for semiconductors is driving a growing environmental impact from their manufacturing. Fraunhofer IPMS is collaborating with over 50 European partners to develop new technologies aligned with the European Green Deal and the EU Chips Act.

The GENESIS project (Generate in Europe a Sustainable Industry for Semiconductors) aims to improve sustainability across the entire microchip lifecycle by 2028. Key priorities include reducing emissions, lessening dependence on critical raw materials, and advancing new recycling approaches. The initiative receives funding from the European Union's Chips Joint Undertaking program, several member states, and the Swiss State Secretariat for Education, Research and Innovation.

Fraunhofer IPMS leads the work package focused on the minimization of waste and emissions. Research efforts are concentrated on reducing the use of per- and polyfluoroalkyl substances (PFAS) and investigating alternative materials and methods. The institute is also addressing process gases like sulfur hexafluoride (SF₆) and nitrogen trifluoride (NF₃), which have a high global warming potential, by optimizing waste gas cleaning systems.

The project is also exploring material reusability, particularly the treatment and reuse of chemical mechanical planarization (CMP) slurries used in wafer polishing. The goal is to decrease material and water consumption, minimize waste generation, and recover valuable raw materials for reintroduction into the production cycle.

Fraunhofer IPMS's advanced cleanroom facilities provide a realistic environment for testing sustainable semiconductor processes and evaluating their impact on industrial manufacturing in collaboration with project partners.