Gigaphoton Launches New Neon Gas Recycling System for Semiconductor Manufacturing
Japanese semiconductor equipment maker Gigaphoton has introduced the hTGM system, capable of recycling 50% of neon gas used in lithography lasers. The technology aims to address supply chain disruptions.
Gigaphoton, a Japanese manufacturer of semiconductor lithography equipment, has unveiled its new hTGM neon gas recycling system. The system is designed for use with the argon fluoride (ArF) excimer lasers crucial to the semiconductor manufacturing process.
The hTGM system achieves a neon gas recycling rate of 50%. Gigaphoton stated that further configuration adjustments could potentially increase this efficiency in the future.
This development comes as the semiconductor industry faces ongoing supply chain challenges, particularly concerning neon gas. Prior to 2022, Ukraine was a major global supplier of neon, accounting for approximately 50% of the world's semiconductor-grade neon. The conflict in the region led to forced export halts, disrupting supply.
Neon gas is a critical component in advanced deep ultraviolet (DUV) lithography processes. In response to supply shortages, countries like China and South Korea have increased their neon production, while chip manufacturers are increasingly adopting gas recycling systems to ensure operational stability.