Ningbo VET Energy Supplies High-Purity Graphite Heaters for Semiconductor Epitaxy

Ningbo VET Energy Technology Co., Ltd is supplying high-purity graphite heaters designed for high-temperature semiconductor processes such as Metal-Organic Chemical Vapor Deposition (MOCVD) and Silicon Carbide (SiC) epitaxy.

These heaters are engineered for stable operation above 1600°C in corrosive process gases, where precise thermal field control is critical for film uniformity, doping concentration, and wafer yield. The company states its isotropic graphite heaters with a 150μm CVD SiC coating have demonstrated significant improvements in third-generation semiconductor manufacturing, reporting an 85% reduction in defects and annual savings of €85,000.

Leveraging high thermal conductivity and a low coefficient of thermal expansion, the graphite heaters ensure uniform heat distribution. They incorporate multi-zone temperature control to minimize variations and prevent contamination. The SiC coating protects the heater from aggressive gases and extends its service life, addressing the sensitivity of epitaxy processes to metallic impurities and particle shedding.