PI showcases contactless maglev motion systems for semiconductor manufacturing
Physik Instrumente has debuted a series of magnetic levitation motion platforms designed to replace mechanical bearings in high-precision wafer processing.
At SEMICON West 2026, Physik Instrumente (PI) demonstrated magnetic levitation (maglev) motion systems aimed at improving the precision of semiconductor manufacturing. By utilizing active magnetic fields rather than traditional bearings, these platforms eliminate friction, mechanical wear, and the need for lubrication.
The company’s new demonstrators include a 400mm linear stage, a rotary wafer stage, and an atomic force microscopy (AFM) scanner. These units provide active control across six axes, allowing for the electronic correction of positioning errors. This functionality replaces the need to stack multiple mechanical stages, simplifying the overall architecture of high-precision equipment.
These systems are targeted at sectors requiring high cleanliness and accuracy, such as hybrid bonding and wafer metrology. The technology aims to address growing industry demands for improved throughput and positioning performance, with the company's research on these platforms receiving recognition during the event's poster sessions.