Tomocube launches desktop system for 3D analysis of glass substrate defects
Tomocube has launched the HT-T1 Desktop system for non-destructive 3D analysis of internal defects in glass substrates. The system, along with TAMI software, aims to accelerate troubleshooting and process optimization in semiconductor packaging.
Daejeon, South Korea-based Tomocube, a company specializing in non-destructive inspection and 3D metrology, has introduced its new HT-T1 Desktop (HT-T1D) system. This unit is specifically designed for high-resolution 3D analysis of defects within glass substrates used in next-generation semiconductor packaging.
The system is optimized for glass substrate inspection and metrology workflows. When conventional automated optical inspection (AOI) systems flag a potential defect, the HT-T1D can precisely locate and three-dimensionally reconstruct the area within the glass substrate. This enables detailed mapping of a defect's position, morphology, and depth characteristics, going beyond what surface inspection can reveal.
Glass substrates, including glass core substrates and glass interposers, are becoming critical materials for applications such as AI accelerators and High Bandwidth Memory (HBM). As these materials enter mass production, manufacturers face significant challenges in identifying the root causes of micro-defects that arise during complex fabrication steps like laser drilling and etching. Since a single critical defect can render an entire unit unusable, the ability to rapidly translate inspection data into process improvements is crucial for maintaining production line stability.
The HT-T1D utilizes Tomocube's holotomography technology to visualize the three-dimensional distribution of refractive index within the glass. The measurement is entirely non-destructive, allowing for repeated analysis of the same location across different process steps. This can significantly shorten defect analysis cycles, from days or weeks to just minutes, enabling early intervention before costly downstream processes.
Alongside the hardware, Tomocube has also introduced TAMI (TomoAnalysis MI), a dedicated 3D analysis software platform. TAMI quantitatively analyzes the 3D refractive index volume data and generates structured reports. The platform offers a unified workflow from R&D to final production line inspection. Tomocube will be working closely with manufacturers to optimize processes related to 3D defect analysis and yield optimization.